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  • TiSi Target SM - 3-2
TiSi Target SM - 3-2 TiSi Target SM - 3-2
TiSi Target SM

Product Name: Titanium silicon target SM

TiSi  targets(SM) are produced in a meltmetallurgical process. 

Application
TiSi targets are used for wear resistant coatings, e.g. cutting tools.

Purity
Metallic purity ≥ 99.6%

Composition ratio
90:10 at%
85:15 at%
80:20 at%

Form of Delivery
Sputtering targets, arc cathodes, round targets up to Ø 220 mm in one segment, rectangular targets up to a length of 1100 mm and a width of 200 mm in one segment (multi-piece construction, depending on the composition).

Chemical Analysis in wt%
C <0.02
O <0.5
N <0.03
Fe <0.1
Tolerance of Ti and Si +/- 1 wt%

Physical Properties
Density supplied: ≥4.4 g/cm3

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